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为提高Mo/Si多层膜的稳定性与使用寿命,通过分析多层膜驻波电场的分布,对表面保护层及多层膜最上层材料的厚度进行优化设计,使优化后的反射率最高.计算表明,一定厚度的表面保护层总对应一个最优的最上层材料厚度.在13.36 nm波长,膜对数为50的Mo/Si多层膜10度入射的理论反射率为74.47%;当添加厚度为2.3 nm的Ru作为表面保护层,对应多层膜最上层Si的优化厚度为3.93 nm,其理论反...
Ge on Si p-i-n photodiodes are characterized on wafer in the time domain at a wavelength of 1550 nm.The photodiode output signal is sampled by a flip flop. At a bit rate of 25 Gbit/s and a Pseudo Rand...
Ge-on-Si waveguide integrated photodetectors including Metal-Semiconductor-Metal (MSM), vertical PIN and lateral PIN diodes are reviewed.
Photonics and Electronics integration is considered using molecular wafer bonding of an optical SOI processed wafer on top of an electronics wafer. InP sources and Ge photodetectors are processed toge...
To clear fundamental limits of electrical interconnection, WDM optical interconnection should be implemented in Si photonics. Challenging issues are strongly connected with temperatures in CMOS proces...
We report on development of large-scale and high functionality photonic integrated circuits on InP and Si platforms for transmitter, receiver, filtering and routing applications and discuss the merits...
ZnO thin films doped with aluminum (AZO) were deposited on silicon dioxide covered type texturized Si substrates by radio frequency magnetron sputtering, to fabricate AZO/SiO2/p-Si heterojunction, a...
The liquid-solid interface motion and the temperature history of thin Si films during short pulse (< 30 ns) excimer laser annealing are observed by in-situ diagnostics. Substantial supercooling (> 200...
Precursor a-Si films are deposited by RF planar magnetron sputtering in argon gas at 200 °C substrate temperature. Properties of the a-Si films have large dependences on sputtering gas pressure. Sheet...
Si作衬底的碲镉汞分子束外延研究。
Integrated photonics via Si CMOS technology has been a strategic area since electronics and photonics convergence should be the next platform for information technology. The platform is recently refer...
Si和Ge衬底上用分子束外延生长HgCdTe。
用分子束外延(MBE)技术, 在GaAs(100)衬底上生长了不同Si掺杂浓度(从1016 cm-3到1018 cm-3)的n-GaAs薄膜。通过在室温下拉曼光谱的测量对n-GaAs薄膜的谱形进行了分析,拉曼位移出现了明显的移动,光学横模TO峰相对的增强,光学纵模LO峰相对的减弱。文章分析了原因这是由于Si掺杂浓度不断的提高,致使界面失配位错不断地提高造成的,内部应力也在不断的增大,原来的晶格振动...
The paper presents investigation results for an Al-Si protective coat deposited from a liquid phase on the ferritic steel surface. A coat of chemical composition of Al - 6.5 wt.% Si was subjected to a...
1.3μm GeSi/Si异质结波导光栅耦合器的设计.

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