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Innovative approach to uniform imprint of micron and submicron features
Plastic forming Submicron-scaleimprint Gas-Assisted
2008/5/30
Purpose: To develop methods for uniform imprint of micron and submicron-scale features.
Design/methodology/approach: The first is gas-assisted imprint technique. In use of gas to exert isotropic pres...
Design of three-dimensional photonic crystals at submicron lengthscales
three-dimensional photonic crystals submicron lengthscales
1995/8/12
We present a new class of periodic dielectric structures designed specifically to be amenable for fabrication at submicron lengthscales. The structures give rise to a sizable 3D photonic band gap and ...